METHODS FOR THE SYNTHESIS OF ARRAYS OF THIN CRYSTAL GRAINS OF LAYERED SEMICONDUCTORS SNS2 AND SNS AT DESIGNED LOCATIONS
In this invention, we describe an experimental implementation of a chemical vapor deposition (CVD) method to achieve the controllable synthesis of thin layered semiconductor (e.g., metal dichalcogenides such as SnS;, TiS 2, M0S1, WS2, etc., and metal halides such as ZrNCI, ZrNBr, etc.) crystal arrays (with a thickness from single- or a few atomic/molecular layers to even micrometers) directly on suitable substrates at the designed locations. The outcome from this transformative research has laid down the foundation for future technological applications in integrated nano-electronic systems.
App Type | Case No. | Country | Patent/Publication No. | |
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Inquire | National Phase | 2013030 | United States | 9,761,446 |